Abstract
Over a certain range of height variations the proportion of light scattered out of a beam illuminating a step feature is related to the height of the step. A comparator technique will be described for measuring step heights in the range 5–100 nm by measuring the visibility of an image of the feature in comparison with the visibility of an image produced by a similar optical system of a step of known height. This technique is still in the development stage but examples will be presented of a variety of features on glass, metal and semiconductor surfaces illustrating the capability of the method to quantify both localized imperfections, such as digs and scratches, as well as distributed defects including turning and grinding marks.
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