Abstract
Scanning laser acoustic microscopy (SLAM) provides a way of visualizing and measuring surface features of nanometric order by a combination of acoustical and optical means. The acousto-optical interface in SLAM is an acoustically transparent and optically reflecting surface embedded in the acoustic medium. Acoustical excitation causes a dynamic surface deformation which is picked up by a focused scanning laser beam which, after reflection, is modulated in its phase and angle of reflection. There are three basically different demodulation schemes reported in the literature: the knife-edge detector, the time-delay interferometric detector, and the reference-beam detector. (In addition, a new detector derived from the knife-edge detector, namely the pyramidal-mirror detector, is scheduled for separate treatment in this session.) This paper presents comparative studies of the above three basic methods of detection. The performance characteristics of each are analyzed in detail by a careful examination of the transfer function for each of the systems. Computer simulations for their operation provide a comprehensive picture of the strengths and weaknesses of each.
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