Abstract
Humidity sensors with comprehensive performance are of great interest for industrial and environmental applications. Most sensors, however, have to compromise on at least one characteristic such as sensitivity, response speed, and linearity. This paper reports a gravimetric humidity sensor based on a capacitive micromachined ultrasonic transducer (CMUT) with exceptional all-around performance, and presents a side-by-side comparative investigation of two types of gravimetric humidity sensors for a better understanding of their characteristics and sensing mechanisms. For these purposes, a circular CMUT and a quartz crystal microbalance (QCM) with a resonance frequency of 10 MHz were designed and fabricated. Poly(vinyl alcohol) (PVA) was employed as the humidity sensing layer for its hydrophilicity and ease of film formation. The electrical properties of the sensors, including the electrical input impedances and quality factors, were characterized by a vector network analyzer. The relative humidity (RH) sensing performance of the sensors was evaluated and compared from RH levels of 11% to 97%. Both sensors exhibited good repeatability and low hysteresis. The unique microscale resonant structure of the CMUT humidity sensor contributed to a high sensitivity of 2.01 kHz/%RH, short response and recovery times of 8 s and 3 s, respectively, and excellent linearity (R2 = 0.973), which were far superior to their QCM counterparts. The underlying mechanism was revealed and discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.