Comparative study of AZO and ITO thin film sputtered at different temperatures and their application in Cu2ZnSnS4 solar cells

Abstract

Indium tin oxide (ITO) and Al-doped ZnO (AZO) are the most common materials for transparent conducting films used as a front contact layer on solar cells. In this study, AZO and ITO thin films were deposited by sputtering under different temperatures in order to study the difference between two kinds of thin films in crystal structure, morphology, optical and electrical properties. In the same time, CZTS solar cells were also fabricated using AZO or ITO thin films as the window layers, and the obtained highest efficiencies of 3.66% and 5.12% are based on AZO and ITO window layers with different sputtering temperatures, respectively.