Comparative study of all-printed polyimide humidity sensors with single- and multiwalled carbon nanotube gas-permeable top electrodes

Abstract

We have developed printed capacitive humidity sensors with highly gas permeable carbon nanotube top electrodes using solution techniques. The hydrophobic, porous multiwalled carbon nanotube (MWCNT) network was suitable for gas permeation, and the response of the capacitive humidity sensors was faster than that of a device with a single-walled carbon nanotube (SWCNT) top electrode. The newly developed measurement system consisting of a small measurement chamber, a computer-controlled high-speed solenoid valve, and a mass-flow controller enabled us to vary the ambient relative humidity within 0.1 s. A comparative study of the devices consisting of a 1.1-µm-thick partially fluorinated polyimide dielectric layer and an MWCNT or SWCNT top electrode revealed that the rise time (humidification process) of the device with MWCNTs (0.49 s) in the transient measurement was almost 3 times shorter than that with SWCNTs (1.48 s) owing to the hydrophobic surface of the MWCNTs. A much larger difference was observed during the drying process (recovery time) probably owing to the hydrophilic parts of the SWCNT surface. It was revealed that the response time was almost proportional to the square of the thickness of the polyimide dielectric layer, d, and the sensitivity was inversely proportional to d. The rise time decreased to 0.15 s and a sensitivity per unit area of 12.1 pF %RH−1 cm−2 was obtained in a device with 0.6-µm-thick polyimide and MWCNT top electrodes. This value is suitable for use in high-speed humidity sensors to realize a real-time humidity and breath-sensing measurement system.