Abstract
Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity l r , dielectric loss tan i , pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films.
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