Abstract
We demonstrate compact waveguide splitter networks in siliconon- insulator (SOI) rib waveguides using trench-based splitters (TBSs) and bends (TBBs). Rather than a 90 degrees geometry, we use 105 degrees TBSs to facilitate reliable fabrication of high aspect ratio trenches suitable for 50/50 splitting when filled with SU8. Three dimensional (3D) finite difference time domain (FDTD) simulation is used for splitter and bend design. Measured TBB and TBS optical efficiencies are 84% and 68%, respectively. Compact 105 degrees 1 x 4, 1 x 8, and 1 x 32 trench-based splitter networks (TBSNs) are demonstrated. The measured total optical loss of the 1 x 32 TBSN is 9.15 dB. Its size is only 700 microm x 1600 microm for an output waveguide spacing of 50 microm.
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