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Abstract
The project for a compact storage ring SIBERIA-AS — a synchrotron radiation (SR) source for X-ray lithography with an electron energy of 600 MeV and an orbit circumference of about 3 m — is considered. The major component of the storage ring is a 3.8 T azimuthally symmetrical magnet consisting of annular superconducting coils without utilization of ferromagnetic material. The suggested design has enabled the effect of iron yoke saturation on the magnetic field distribution to be eliminated, and both the weight (about 8 tons) and the overall dimensions (a cylinder of 2 m in diameter and 2 m in height) to be considerably reduced. The basic systems of the storage ring are described and its parameters are reported.
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