Abstract
AbstractMode converters are key components in on‐chip mode‐division multiplexing systems. A compact silicon waveguide mode converter is proposed and demonstrated using all‐dielectric metasurface structure with a tilted subwavelength periodic perturbation. The proposed waveguide mode converter can be scaled to realize arbitrary waveguide mode conversion. As examples, two waveguide mode converters are experimentally demonstrated on a silicon‐on‐insulator wafer, which can convert the TE0 mode to the TE1 mode and the TE2 mode with coupling lengths of 5.75 and 6.736 µm, respectively. The conversion losses of <1 dB and crosstalk values of <−10 dB are achieved for both the TE0‐to‐TE1 and the TE0‐to‐TE2 mode converters.
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