Compact Modeling of SOI MOSFETs With Ultrathin Silicon and BOX Layers

Abstract

The reported compact SOI-MOSFET model hiroshima university starc igfet model-silicon on thin buried oxide (HiSIM-SOTB) has been developed for devices with ultrathin silicon on insulator (SOI) and buried oxide (BOX) layers. The potential distribution determined by the Poisson equation is accurately solved with the Newton iteration method across the SOI layer and in the substrate on the backside of the BOX for source and drain side of the device. All charges including accumulation and inversion charges on both side of the BOX are explicitly considered in the Poisson equation. It is found that different from the double-gate MOSFET, the influence of the impurity concentration of the bulk substrate below the BOX must be also explicitly considered to capture all measured properties of the silicon on thin buried oxide (SOTB) MOSFET. A further modeling challenge of the thin SOI and BOX layers, which had to be overcome, is that charge neutrality is not independently preserved at the front-gate oxide or at BOX side, but only totally within the whole device. Additionally it is found that, due to the consistent potential- and charge-based model formulation, the developed HiSIM-SOTB model can reproduce not only TCAD and measured SOTB device data but is even capable to predict the effects of structural variations, including the limiting case of the double-gate MOSFET structure.