Compact modeling of quantum effects in symmetric double-gate MOSFETs

Abstract

Quantum effects have been incorporated in the analytic potential model for double-gate MOSFETs. From extensive solutions to the coupled Schrodinger and Poisson equations, threshold voltage shift and inversion layer capacitance are extracted as closed form functions of silicon thickness and inversion charge density. With these modifications, the compact model is shown to reproduce C–V and I–V curves of double-gate MOSFETs consistent with those obtained from those measured from experimental FinFET hardware.