Abstract
The size of machines for the manufacture of micro-components commonly stands in gross disproportion to the component size. The achievable accuracy is limited by inaccuracies of mechanical positioning elements and external disturbances. Micro-machining of metals can be realised in manifold ways by laser processes. In this paper, a compact module for laser chemical processing using continuous wave laser radiation is presented. For the laser-induced chemical machining the material removal is a result of thermochemical reactions between an etchant and the surface of a metallic workpiece at low laser power densities. Laser-induced chemical machining results in improved surface quality of the machined workpiece and it also avoids stress and strain of the material. Through the use of a micro-mirror array (DMD) for flexible beam shaping a 2-dimensional machining of the workpiece is possible. The laser chemical machining method now allow for the first time to connect the DMD technology with laser-based micro-machining for compaction of the machining module.
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