Abstract
In this letter, two types of compact low-loss monolithic coplanar waveguide (CPW) filters using air-gap overlay structures are presented. Vertical stacking in overlay structures offers size reduction. Furthermore, air-gap overlay structures do not require additional dielectric process and are free from dielectric losses. An X-band bandpass filter using air-gap overlaid artificial transmission lines showed 67% size reduction. A stepped-impedance low-pass filter using highly separated metal-air-metal (MAM) capacitors as low-impedance lines achieved not only size but also loss reduction. Small size, low loss, and simple process steps make the air-gap overlay structures very promising for monolithic CPW passive devices such as filters.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
