Abstract
A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are ± 2.5 ″ and ± 3.5 ″ without correction, and the residuals are ± 1.9 ″ and ± 2.8 ″ after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from ± 4.8 μ m to ± 2.8 μm and ± 5.9 μm to ± 3.6 μm, respectively. The comparison deviation of the roll is ± 4.3 ″ . The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.
Highlights
Any object has a 6-degree-of-freedom motion error in space, that is, movement in three axes and rotation around three axes
Multiple-degree-of-freedom methods are mainly divided into three types according to the measurement principle: laser interferometry, laser grating diffraction, and laser collimation
This paper provides a compact five-degree-of-freedom simultaneous measurement system based on the laser collimation method
Summary
Any object has a 6-degree-of-freedom motion error in space, that is, movement in three axes (positioning, vertical, and horizontal straightness errors) and rotation around three axes (pitch, yaw, and roll). J. Lee proposed a heterodyne grating interferometer for measuring two-dimensional straightness based on a quasi-common optical path (QCOP) [14]. Lee proposed a heterodyne grating interferometer for measuring two-dimensional straightness based on a quasi-common optical path (QCOP) [14] Li et al proposed using a single-mode and fiber-coupled laser as the light source to improve the spatial stability and energy distribution of the measured laser beam [26,27] This type of measurement method has a simple structure, few optical devices, and low cost. We use optical components to make each beam pass through two corner cube retroreflectors, which magnify the lateral movement and roll of the retroreflector twice This method improves the measurement resolution of roll and horizontal straightness compared to other laser collimation measurement methods.
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