Abstract
A review of our progress in the realization of an ultrashort-pulse laser-driven hard-x-ray source based on the combination of a femtosecond laser system with an x-ray diode is given. New results on the development of electron-based compact EUV sources for at-wavelength metrology are presented. Detailed investigations of spectral, spatial, and temporal characteristics of both sources are performed and possible applications are discussed.
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