Abstract
Diaphragm vacuum pumps are increasingly being used as roughing pumps for wide-range turbo molecular pumps, gas analyzers and other laboratory applications. Numerically optimized planar diaphragm technology and electronic drive systems make these systems even more compact, powerful and reliable. Maintenance intervals beyond 40,000 hours of continuous operation - similar to the interval of turbo molecular pumps - seem now reachable with variable speed systems.
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