Abstract
An improved version of a data processing and control system has been used with state-of-the-art AES and SIMS instruments. It consists of a mainframe with CPU, buffer and IEEE 488 interface to a host computer and a range of plug-in submodules. Its features include three-dimensional analysis, imaging, multichannel spectra and sample bias control. The performance of the system has been tested by AES and SIMS depth profile measurements of Si-Ge multilayers.
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