Abstract

The ring resonator is a versatile and functional component in the silicon-based integrated optical circuit. Most of the previously reported ring resonators work in the single-mode case. With the rapid development of mode division multiplexing technology, a multimode ring resonator (MMRR) has been proposed and the usage beyond the limit of a conventional single mode ring resonator has been explored. However, the reported MMRRs are either large in size or low in quality factor. In this paper, we designed a compact silicon MMRR with a small bending radius of 15µm, in which the three lowest TE modes all have high Q-factors. For suppressing the mode loss and inter-mode crosstalk in MMRR, a multimode waveguide bend (MWB) with mode adiabatic evolution was designed based on transformation optics and waveguide shape optimization. The independent excitation of each order mode of the MMRR is realized by using bending directional coupler and asymmetric directional coupler. We successfully fabricated the device on a silicon-on-insulator (SOI) platform using simple one-step lithography. The measured loaded Q-factors of the three lowest TE modes are 5.9 × 104, 4.5 × 104, and 4.7 × 104, respectively.

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