Abstract
The newest experimental validation report of the coverage for the rotationally non-symmetric departure of a freeform surface in adaptive interferometry is about 20 µm. A compact adaptive interferometer is introduced to test unknown freeform surfaces with larger departure. The cascaded DMs (woofer and tweeter) can effectively double the measurable rotationally non-symmetric departure, to ∼80 µm using current DM technology. With a constrained decoupling control algorithm, the woofer and tweeter can averagely share the aberrations without coupling. DM surface monitoring is addressed by a time-division-monitoring (TDM) technique, which avoids separate monitoring devices and configurations and thus makes a compact configuration. Measurements of two different surfaces are presented: a nearly flat freeform with ∼40 um departure, and an off-axis paraboloid with ∼50 um of asymmetric departure.
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