Compact 600-W KrF laser

Abstract

An analysis is made of the results of an experimental investigation of a high-power electric-discharge KrF laser with UV preionisation. It is shown that the average output power of the laser increases with increase in the pulse repetition rate up to 620 Hz, at which the maximum (for the investigated class of laser) average power of 630 W is reached. The results demonstrate a realistic promise of constructing an industrial KrF laser which has a stabilised output power of 300 — 500W. This laser can operate continuously when the stabilised average output power is 300 W: there is no need to replace the gaseous mixture for 8 h (12 × 106 pulses). The pulse-to-pulse instability of lasing is then ~ 2%.