Abstract
Characteristics of a microwave driven 3.4 cm diameter compact ion/atom source equipped with permanent magnets were tested. The source can be mounted to a standard copper gasket flange, and microwave power is supplied through an N-type microwave connector. The ion source plasma was observed through an ion extraction hole with an optical emission spectrometer. Peak height of an optical line spectrum emission corresponding to atomic nitrogen increased in proportion to the microwave input power. Quadrupole mass spectrometer showed that N(+) and N(2)(+) were the dominant species in the extracted ion beam. Nitrogen ion current density of 0.23 mA/cm(2) was obtained with only 10 W discharge power and 6 x 10(-3) Pa source surrounding pressure.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
