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Abstract
A compact 14.5 GHz electron cyclotron resonance ion source (ECRIS) for production of multiply charged ions (MCI) with a plasma-confining magnetic field generated by permanent magnets has been constructed. Microwave power with frequency between 12.75 and 14.5 GHz is transmitted from ground potential via an insulating window into the watercooled plasma chamber fitted with an aluminium liner. The HF coupling system serves as biased electrode. Operation in the gas-mixing mode is achieved with two remotely controlled gas inlet valves. The triode ion extraction system has been optimized for low acceleration voltages between 1 and 10 kV. The ECRIS is fully computer-controlled and can be remotely operated via Ethernet. Finally, we refer to recent experimental work on collisions of slow MCI generated by the new ECRIS with neutral gas particles and surfaces.
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