Abstract
In the subject publication, Mathiot casts doubt upon our Monte Carlo simulations of Au diffusion in Si with the kick-out mechanism. We argue that our simulations were correct. In addition, we observe that Mathiot's treatment of diffusion lacks information on boundary conditions which is necessary for accurate modeling. Mathiot's model also ignores the possible existence of vacancy clusters. Mathiot concluded that diffusion of Au in Si is dominated by the kick-out mechanism. We argue that this conclusion is unjustified.
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