Combustion Reaction Characteristics in the Nitridation of Silicon

Abstract

The combustion reaction characteristics in the nitridation of Si was investigated by measuring the combustion velocity (in the propagation process) and the combustion temperature. Silicon powder mixed with proper amount of Si{sub 3}N{sub 4}, which was added to produce a uniform and steady-state combustion reaction without residual Si, was packed into a porous refractory container and burned under high nitrogen pressures (up to 50 MPa). The combustion velocities and the maximum combustion temperatures were independent of the starting compositions despite large differences in the adiabatic combustion temperatures depending on the starting compositions. The combustion reaction is considered to be strongly controlled by the decomposition reaction of Si{sub 3}N{sub 4}. The primary structure of the combustion wave in the nitridation of Si is proposed.