Abstract
Combustion and explosion in layers of nanostructured porous silicon has been studied in relation to the layer thickness and duration of sample storage after electrochemical anodization. The amount of hydrogen adsorbed on the surface of porous silicon after anodic treatment is evaluated. The amount of hydrogen accu-mulated in porous silicon is 4 wt %. Prototype microsystem devices employing the energy of the processes studied have been developed and fabricated. The combustion of porous silicon can be used as an energy source for silicon microactuators and the microexplosion can be employed both in self-destructing silicon chips and for dividing silicon wafers into separate crystals.
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