Abstract
The ongoing miniaturization in micro- and nanotechnology requires multi-physical characterization methods on the same small scale as the materials and components are. Although many characterizations systems exist, only few approaches allow to gather several different types of information collaboratively. Furthermore, functional building blocks and devices working on the nanoscale, have to be characterized and tuned during the manufacturing process. This can be done with combined microscopic and processing systems. A software framework, which controls and acquires all units and data, is engaged and allows combined analysis and automation. This combination approach is demonstrated by several applications in microscopy, manipulation and automation on the small scale.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
