Abstract

This paper develops a microfluidic chip and a binary optical element (BOE) for flow cytometry. The chip is capable of achieving three-dimensional (3D) hydrodynamic focusing, where the sample flow is focused down to 13–23 μm in a velocity range of 0.9–10 m/s. The BOE is used to shape and homogenize laser beam, providing a flat-top 10 μm × 50 μm rectangular spot for illumination. The two devices were combined to build a micro flow cytometer. It was able to estimate microbead sizes and count at 1.3–20k eps with high signal quality, which was competitive to commercial instruments.

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