Abstract
Journal Article Combining Eels and Angle-Resolved Aes to Measure Shallow Profiles of Thin Nitrided Oxide Films on Si Get access J Bruley, J Bruley IBM Microelectronics Division, Hopewell Junction, NY Search for other works by this author on: Oxford Academic Google Scholar H Wildman, H Wildman IBM Microelectronics Division, Hopewell Junction, NY Search for other works by this author on: Oxford Academic Google Scholar A Paterson A Paterson IBM Microelectronics Division, Hopewell Junction, NY Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 8, Issue S02, 1 August 2002, Pages 596–597, https://doi.org/10.1017/S1431927602105927 Published: 01 August 2002
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