Abstract
One of the limitations in the use of the conventional analytical electron microscope (AEM) with lower voltages of 100 to 200 kV is based on its poor image resolution compared to normal transmission electron microscope. Because of this, it is difficult to carry out structure determination by directly observing individual atom arrangements in crystals. However, a new AEM with an intermediate voltage of 400 kV (JEM-4000EX, TEMSCAN) is fully capable of high resolution observation under equipment of an energy dispersive x-ray spectrometer (EDS) and an electron energy loss spectrometer (EELS). The present paper shows crystal structure images of sialon polytypes and corresponding EDS and EELS spectra, and describes the usefullness of combined techniques of structure imaging and microanalysis in structure-composition determination.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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