Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

Abstract

A new combined particle-in-cell Monte Carlo collisions (PIC–MCC) approach has been developed for accurate and fast simulation of a radio frequency (rf) discharge at a low gas pressure and high plasma density. Test calculations of heating mode transition in a capacitively coupled rf discharge in helium and argon show a good agreement with experimental data. We demonstrate a high efficiency of the combined PIC–MCC algorithm, especially for the collisionless regime of electron heating.