Abstract

This paper presents a design method of ultrasonic motors using finite element analysis and subproblem approximation method. It adopts the finite element method for modal analysis and harmonic analysis of the motor, and subproblem approximation method for searching the optimal solution of design variables. To verify the effectiveness of the design method, the proposed design method is applied to the design of a rod shape ultrasonic motor. The motor structure is determined using the proposed method. A prototype ultrasonic motor is manufactured using the design results and measured experimentally. The results demonstrate that the design method is effective and available for the design of ultrasonic motors.

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