Abstract
The terahertz hollow-core metal rectangular waveguide cavity is a typical terahertz rectangular cavity structure that has several advantages and is widely used. However, the fabrication of the terahertz hollow-core metal rectangular waveguide cavity with high working frequency has not made recent breakthroughs, especially when the working frequency is 1-THz and above. In this paper, a combined process of electrochemical deposition and selective chemical dissolution is proposed first to manufacture the terahertz hollow-core metal rectangular waveguide cavity with high working frequency. Taking the fabrication of a 1.7-THz hollow-core metal rectangular waveguide as an example, the manufacturing methods and experiments of each step are described systematically. A terahertz hollow-core metal rectangular waveguide cavity with an end face size of 81.9 × 162.7 µm2, the edge radius less than 10 µm, the internal bottom surface roughness less than 0.08 µm, and the internal side surface roughness less than 0.3 µm is obtained. These experimental results are matched with the processing requirements of a 1.7-THz hollow-core metal rectangular waveguide. This flexible and controllable combined process makes it possible to manufacture more types of terahertz hollow-core metal rectangular cavity structures with high working frequency.
Highlights
INTRODUCTIONTerahertz technologies have been applied in many fields, including wireless communications, radar imaging, biomedicine, non-destructive testing, and space exploration, and have promoted continuous breakthroughs. The significance of such technologies has been widely recognized in the development of modern science and technology, national defense construction, and the national economy. The generation, transmission, reception, detection, and imaging of terahertz waves are based on various device types, which often have metal or surface metalized rectangular cavity structures. A terahertz hollow-core metal rectangular waveguide cavity is a typical structure that is characterized by a metal matrix in the outer layer and a rectangular hollow-core structure with gold, silver, and other metal layers in the middle. This has advantages such as low transmission loss, good flexibility, and high safety, and this has been widely used
As the rectangular mandrel with an end face size at tens of micrometers or even several micrometers can be fabricated using nickel micro-electroforming, the fabrication of a high working frequency terahertz hollow-core metal rectangular waveguide cavity can be realized by this combined machining process
A rectangular groove with a height of 150 μm and width of 165 μm was used for the electrochemical deposition based on the end face size of the 1.7-THz hollow-core metal rectangular waveguide cavity
Summary
Terahertz technologies have been applied in many fields, including wireless communications, radar imaging, biomedicine, non-destructive testing, and space exploration, and have promoted continuous breakthroughs. The significance of such technologies has been widely recognized in the development of modern science and technology, national defense construction, and the national economy. The generation, transmission, reception, detection, and imaging of terahertz waves are based on various device types, which often have metal or surface metalized rectangular cavity structures. A terahertz hollow-core metal rectangular waveguide cavity is a typical structure that is characterized by a metal matrix in the outer layer and a rectangular hollow-core structure with gold, silver, and other metal layers in the middle. This has advantages such as low transmission loss, good flexibility, and high safety, and this has been widely used.. Yang et al used this method to fabricate a rectangular cavity structure with a WR-3 waveguide filter using a copper alloy material with an end face of 0.864 × 0.432 mm2.12 In recent years, 3D printing technology has been gradually applied to manufacture terahertz hollow-core metal rectangular cavities.. The characteristic size of terahertz devices in high working frequency will be further reduced, and the requirements of the terahertz hollow-core metal rectangular cavity such as size accuracy, surface roughness, and machining rounded edges will be more stringent. As the rectangular mandrel with an end face size at tens of micrometers or even several micrometers can be fabricated using nickel micro-electroforming, the fabrication of a high working frequency terahertz hollow-core metal rectangular waveguide cavity can be realized by this combined machining process. The machining process of a 1.7-THz hollow-core metal rectangular waveguide cavity will be described in detail to verify this combined process
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