Abstract
Multi-layer Y3Al5O12:Gd thin films were deposited in a combinatorial fashion using radio-frequency magnetron sputtering. Initially, Y3Al5O12 (yttrium aluminum garnet or YAG) films were deposited in a combinatorial fashion to optimize the Y and Al sputtering conditions. Subsequently, alternating layers of uniform Y3Al5O12 and graded Gd were deposited and the film composition was homogenized by post-deposition 1000 °C 10-h thermal treatment. A composition range of ∼1–12 at% Gd was produced in two films. Ultraviolet emission with a peak wavelength at 312 nm was observed from the gadolinium 8S7/2-6P7/2 transition via cathodoluminescence (CL) excitation. The CL-induced intensity was found to be maximum at ∼5.5 at% Gd.
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