Abstract
The electromagnetic behavior of nanoscale layered and particulate structures of Fe x Al 1 − x N y O 1 − y materials have potential applications in medical device technologies. Iron and aluminum have been co-sputtered in an Ar–N 2 ambient to form a combinatorial array of Fe x Al 1 − x N y O 1 − y thin films. Using this approach, we are able to achieve an Fe/(Fe + Al) cation range from ∼ 12–60% over a 10 cm long substrate. The deposited films were annealed in vacuum at various temperatures and the films have been characterized by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, scanning electron microscopy, scanning transmission electron microscopy, and X-ray diffraction. Furthermore, the direct current magnetic properties of the films have been characterized. In this paper, we describe in detail the reactive combinatorial Fe x Al 1 − x N y O 1 − y sputtering approach. The chemical, structural, and morphological properties as a function of Fe/(Fe + Al) content are demonstrated and correlated to the measured dc magnetic properties.
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