Abstract
In this work, we discuss the development of combinatorial deposition and analysis tools for the investigation of and the optimization of transparent conducting oxides. Library deposition by co-sputtering followed by optical analysis is shown to be a facile way to achieve these goals. Initial work focused on Zn-Al-O libraries with low Al contents as a test case. Subsequent work has focused on the ZnO-SnO 2 tie line. Local maxima in the composition dependence of the conductivity were found for Zn/Sn ≈2:1 (Zn 2SnO 4) and Zn/Sn ≈1:1 (ZnSnO 3). For these two representative stoichiometries, constant composition films have also been grown by pulsed laser deposition.
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