Combination of high spatial resolution and low minimum detection limit using thinned specimens in cutting-edge electron probe microanalysis

Abstract

The effect of sample thickness on the spatial resolution and minimum detection limit (MDL) has been investigated for field-emission electron probe microanalysis with wavelength dispersive X-ray spectroscopy (FE-EPMA–WDX). Indium gallium phosphide samples thinned to thicknesses of about 100, 130, 210, 310, and 430nm provided effective thin-sample FE-EPMA–WDX in the resolution range of 40–350nm and MDL range of 13,000–600ppm (mass). A comparison of the FE-EPMA results for thin and bulk samples demonstrated that thin-sample FE-EPMA can achieve both higher sensitivity and better spatial resolution than is possible using bulk samples. Most of the X-rays that determine the MDL are generated in a surface region of the sample with a depth of approximately 300nm. The spatial resolution and MDL can be tuned by the sample thickness. Furthermore, analysis of small amounts of Cl in SiO2 indicated that thin-sample FE-EPMA can realize a spatial resolution and MDL of 41nm and 446ppm at Iprob=50nA, respectively, whereas bulk-sample FE-EPMA offers a resolution of only 348nm and MDL of 426ppm.