Abstract
The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.
Highlights
A metal oxide (MOX) sensor is a good example for rapid prototyping of functionally complete Micro-electromechanical systems (MEMS) devices in compact packages for surface mount devices (SMD package).The MOX sensor is a complex MEMS product, but it has a complex and specific package
The general construction of the gas-sensitive metal oxide sensor [1] is a combination of the following parts responsible for specific functions: Microhotplate, which is responsible for the level of power consumption and parameters of temperature cycling regime of the metal oxide gas sensor; Chemical composition of the layer of nanostructured metal oxide sensitive to the gas, which is responsible for the sensitivity to specific gases; Package, responsible for the functional applications in which the sensor can be used
The approach to manufacture MOX sensors with 3D prototyping technologies presupposes the availability of materials and methods. We demonstrate that this approach to the fast prototyping of MOX sensors is possible and the sensors’ properties are comparable in terms of the gas sensing ability to commercial sensors
Summary
A metal oxide (MOX) sensor is a good example for rapid prototyping of functionally complete MEMS devices in compact packages for surface mount devices (SMD package). The MOX sensor is a complex MEMS product, but it has a complex and specific package. Despite the existing market of companies with a large production of MOX sensors [2,3,4,5]. That is why fast prototyping methods are becoming relevant, since they allow the production of small sensor lots with a customized design and layout.
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