Abstract
This study concentrates on steady collisionless gas flows inside arbitrary enclosures, which are either convex or concave, two-dimensional or three-dimensional, formed by several plates maintained at different temperatures. If the molecular reflections on these plates are completely diffuse, then at the final steady flow stage for any point inside the enclosures, the velocity distribution function (VDF) is completely determined, and macroscopic properties such as density, velocities, temperature, and heat flux can be exactly determined by integrating the VDF with different moments. The result from this study leads to many exact solutions for internal collisionless gas flow and thermal fields, such as those inside vacuum packaged micro-/nanoelectromechanical system devices. These solutions are applicable as base solutions to solve flows with a much smaller Knudsen number.
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