Abstract
A model of collisional RF sheath with negative ions is discussed inthis paper. The influences of collision and negative ions on theparameters of the sheath are studied through numerical simulation.It is found that when the collision coefficient increases and the RFpower is fixed, the electrode potential and sheath electric fieldpotential increase, the electrode current and thickness of thesheath decrease. When the negative ion content changes, the samephenomenon occurs.
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