Abstract
We analyze theoretically the mixing processes involved in the desorption by ion bombardment of monolayers (adsorbed or deposited) on a substrate. For analytical relocation cross sections, we solve numerically the balance equation derived by Sigmund et al. [Nucl. Instr. and Meth. 194 (1982) 541] for the evolution with ion fluence of the composition of irradiated polyatomic targets. We also analyze the effect of the surface barrier on the mixed profiles. We compare our results with experimental data from Morita et al. [Surf. Sci. 157 (1985) L361; Nucl. Instr. and Meth. B13 (1986) 457 and B18 (1987) 407].
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