Abstract

IR multiphoton absorption (MPA) and dissociation (MPD) of Si 2F 6 in Ar were investigated. For the 10R (26) line (979.7 cm −1) of the CO 2 laser, the average number of photons absorbed and the MPD yield were obtained for different laser fluences and buffer gas pressures. The fraction of excited molecules was as high as 70%. The MPD probability was found to be heavily suppressed when more than 5 Torr of Ar buffer gas was added, indicating that vibrational deactivation is predominant over MPA increase with pressure.

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