Abstract
A collimator has been constructed to produce high-quality ion beams with diameters and angular divergences as small as 1 μm and 1 μrad, respectively. The slit scattering could be effectively suppressed by using properly shaped and manufactured collimator slits. The quality of the collimator was investigated for collimator diameters between 20 μm and 1 μm using 1 MeV H + and H 3 + beams. A design for a proton scanning microprobe making use of this collimator system and a small quadrupole doublet is discussed.
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