Abstract
Progress in plasma chemistry and plasma physics set up possibilities to fabricate high quality compound films for various applications by low-temperatur PVD and CVD techniques. Industrial ion platting processes for the production of wear resistant coatings on tools and machine parts and of hard and stabile optical coatings as well as a plasma polymerization process for the production of protective coatings on plastics are described. Die Fortschritte in der Plasmachemie und Plasmaphysik eröffnen neue Möglichkeiten, hochqualitative chem. Verbindungsschichten für verschiedene Anwendungen durch Niedertemperatur PVD und CVD herzuustellen. Es werden industrielle Ionenplattier-Prozesse zur Erzeugung von Verschleiß-Schutz-Schichten auf Stahlwerkzeugen und Maschinenteilen sowie zur Herstellung von harten und stabilen optischen Schichten beschrieben. Weiter wird ein Plasmapolymerisationsprozess zur Erzeugung von harten Schutzschichten auf Plastik vorgestellt.
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