Abstract
Large area flat panel detector is the key component of X-ray imaging system. In this study, Ga2O3 thin film photoconductor was prepared using electron-beam evaporation. A cold cathode X-ray flat panel detector was fabricated using Ga2O3 thin film photoconductor as the anode. X-ray response of the detector was measured and the results verified the possibility of using Ga2O3 thin film as the photoconductor for vacuum X-ray detector.
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