Coherent quasi-CW 153-nm light source at high repetition rate

Abstract

We present a quasi-cw laser in vacuum ultraviolet region at megahertz repetition rate. The narrowband pulses generated from an ytterbium-fiber laser system at 33 MHz repetition rate at the central wavelength of 1074 nm is frequency-converted by successive stages of LBO crystals and KBBF crystals. The generated radiation at 153 nm has the shortest wavelength achieved through phase-matched frequency conversion processes in nonlinear optical crystals to our knowledge.