Abstract
A method for calculating strain and stress tensors and the density of elastic energy in the framework of linear anisotropic elasticity theory has been developed. The method is valid for arbitrary symmetries of conjugated crystals and arbitrary interface orientations. Both a crystallographic tilt of an epitaxial layer with respect to the substrate and the phenomenon of layer triclinic distortion have been considered. The results are compared with experimental data. The method has been also used for an optimization of structural perfection of heterostructures with non-cubic components.
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