Abstract
A highly coherent extreme ultraviolet source was obtained by phase-matched high-order harmonic generation in a semi-infinite gas cell filled with helium gas at ~550 Torr. The phase matching condition can be achieved for the generation of a few harmonic orders around 13.5 nm by variation of the gas pressure, focus position, and laser intensity. We demonstrate that the source is usable for coherent diffractive imaging and a spatial resolution of ~200 nm with short exposure times can be achieved.
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