Coherence Correlation Interferometry in Surface Topography Measurements

Abstract

Assessment of surface topography can be done by various methods, especially stylus and optical methods as well as utilising scanning tunneling microscopes and atomic force microscopes (Whitehouse, 1994, 2003; Thomas, 1999; Wieczorowski, 2009). The most accurate techniques for assessing surface topography include optical methods (Leach, 2011), especially methods of interference (Pluta, 1993; Hariharan, 2007). In the last two decades, there have been rapid developments in interferometry, as a result of the new possibilities for digital recording and analysis of interference images. The fastest growing interference methods include Phase Stepping Interferometry (PSI) (Creath, 1988; Stahl, 1990; Kujawinska, 1993; Creath & Schmit, 2004) and methods based on coherence analysis of light reflected from the test and reference surfaces (Harasaki et al., 2000; Blunt & Jiang, 2003; Schmit, 2005; Blunt, 2006; Petzing et al., 2010). This second group of methods is defined in different terms in English (Petzing et al., 2010; Leach, 2011), for example:  Coherence Correlation Interferometry (CCI),  Coherence Probe Microscopy (CPM),  Coherence Scanning Microscopy (CSM),  Coherence Radar (CR),  Coherence Scanning Interferometry (CSI),  Coherence Scanning Microscopy (CSM),  Scanning White Light Interferometry (SWLI),  Vertical Scanning Interferometry (VSI),  White Light Scanning Interferometry (WLSI).