Abstract

AbstractThe concept of using cobalt disilicide as a self-aligned metallization scheme for gate/interconnection and contact formation is gaining wide acceptance. The silicide formation on the gate will require a Co-metal film interaction with the underlying polysilicon that may be doped heavily. We have investigated the silicide formation kinetics during this reaction. The effect of different dopants (B,P, and As) and their concentration on the Co-Si interaction and the dopant redistribution during such reactions were investigated. The results from these studies will be presented and discussed.

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