Abstract
This paper deals with a small mobile device, a `seal mechanism', with three degrees offreedom (DOFs) for a scanning probe microscope. This device has two piezoelectricactuators, two controlled electromagnets A and B and electromagnet C, that generates aconstant friction. The frictional forces at electromagnets A and B are alternated by anon-off control. The whole device wriggles with electromagnets C when thepiezoelectric actuators extend and contract. The 3-DOF device can move in up tomicrometre-steps in the x- and y-directions and up to submilliradian steps in theθ-direction. The movable range is infinite in principle. The seal mechanism performs aswell as the inchworm mechanism. The seal mechanism needs a smaller number of controlledactuators and is driven by a smaller number of steps than the multiple-DOF positioningstages employing the inchworm mechanism.
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